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公开(公告)号：US11947267B2
公开(公告)日：2024-04-02
申请号：US17952380
申请日：2022-09-26
发明人： Atsushi Shigenobu , Fuma Kizu
IPC分类号： G03F7/00
CPC分类号： G03F7/705
摘要： A method including calculating, using an objective function, which includes a regression model used to estimate an array of a plurality of regions on a substrate and a regularization term used to limit a value of a coefficient of the regression model, a value of each of a plurality of coefficients included in the regression model, with which the objective function becomes not more than a reference value, extracting, based on the calculated values, the coefficient having the value not less than a threshold value from the plurality of coefficients, and obtaining, using a regression model including only the extracted coefficient, an array of a plurality of regions on a substrate.
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公开(公告)号：US20220309647A1
公开(公告)日：2022-09-29
申请号：US17703460
申请日：2022-03-24
发明人： Fuma Kizu , Koji Ishibashi , Sentaro Aihara
摘要： An evaluation apparatus that evaluates a composition formed on a substrate by forming processing is provided. The apparatus comprises an obtaining device that obtains an image including the composition by the forming processing, and a processing device that processes the image for the evaluation. The processing device outputs a feature of each of one or more abnormalities in the image according to an inference model, obtains information regarding a formation region on the substrate where the composition has been formed, determines the kind of each of the abnormalities based on the output feature of each of the abnormalities and a relationship between the information and a position and a size of the abnormality, and makes, based on a result of the determination, final determination as to whether the image is a normal image or an image including an abnormality.
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