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公开(公告)号：US3925187A
公开(公告)日：1975-12-09
申请号：US23660972
申请日：1972-03-21
Applicant: CENTRE NAT ETD SPATIALES
Inventor： BERNARD JACQUES LEON
CPC classification number: C23C14/46
Abstract: In order to build up a thin layer coating on a substratum, a target made of a suitable material and located in the vicinity of said substratum is striked under a high vacuum by a beam of ions of high kinetic energy delivered by a duoplasmatron. Several commutable targets may be used for building up multilayer coatings. An intermediate chamber, located at the exit of the duoplasmatron, may be fed with a reacting gas (oxygen, nitrogen, etc.) in order to obtain compound coatings (oxides, nitrides, etc.).
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