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公开(公告)号:US20220185677A1
公开(公告)日:2022-06-16
申请号:US17603075
申请日:2019-04-15
发明人: Daisuke Ihara , Yoshimi Sano , Hirohumi Yoshimoto , Hideaki Shimizu , Hideaki Hashimoto , Akihiro Takeuchi , Kiyofumi Higashimoto
IPC分类号: C01B32/914 , H05H1/34 , C04B35/56
摘要: Hafnium carbide powder for plasma electrodes is represented by a chemical formula HfCx (where x=0.5 to 1.0). The content of carbon particles contained as impurities in the hafnium carbide powder is less than or equal to 0.03% by mass. The hafnium carbide powder preferably has an average particle size of 0.5 to 2 μm. To produce the hafnium carbide powder, a pellet made from mixed powder of hafnium oxide and carbon is first placed in a second crucible made of silicon carbide. Then, the hafnium carbide powder is formed by heating the second crucible at 1800 to 2000° C. with the second crucible arranged in a first crucible made of carbon.