公开(公告)号：US10317269B2

公开(公告)日：2019-06-11

申请号：US15516164

申请日：2015-11-05

Applicant: CKD CORPORATION

Inventor： Naoya Shiroyama ,  Akihito Sugino ,  Minoru Ito

IPC: G01F25/00 ,  G01N7/14

Abstract: A flow rate verification unit that uses the pressure variation value per unit time of a pressure measurement value measured by a pressure gauge and a temperature measurement value measured by a thermometer in a state where a second shut-off valve is closed to calculate the volume between a flow-rate control valve and the second shut-off valve and verifies the flow rates of mass flow controllers one at a time, wherein a first verification side connection part attachably and detachably connected to an integrated gas unit is provided upstream from the pressure gauge and a serially connected verification gas input valve, verification side mass flow controller, and verification side flow rate control valve are provided in parallel with the second shut-off valve.