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公开(公告)号:US20200318753A1
公开(公告)日:2020-10-08
申请号:US16905632
申请日:2020-06-18
Applicant: CKD Corporation
Inventor: Akihiro ITO , Masayuki KOUKETSU , Masaya YAMAUCHI , Toshikazu TSURUGA
Abstract: A flow rate ratio control valve includes a pair of plate springs, each of which applies elastic force in a predetermined direction in accordance with the amount of deformation, a valve body supported by the pair of plate springs to be movable in the predetermined direction, a drive unit which drives the valve body in the predetermined direction in a non-contact state by means of electromagnetic force applied to a region between the pair of plate springs in the predetermined direction, a container in which the plate springs and the valve body are contained, and a damper which is attached to the valve body, defines a sectioned predetermined space in cooperation with an inner surface of the container, and forms a predetermined gap between the damper and the inner surface, the predetermined gap establishing communication in the predetermined direction between the predetermined space and the exterior of the predetermined space.