-
公开(公告)号:US20230242812A1
公开(公告)日:2023-08-03
申请号:US18003023
申请日:2021-06-22
CPC分类号: C09K11/665 , C01G21/16 , C30B23/06 , C30B29/12 , C23C14/0694 , C23C14/24 , C01P2002/34 , C01P2002/72 , G01T1/2023
摘要: A method for depositing an inorganic perovskite layer, comprising the following steps: providing a substrate and an inorganic target; positioning the substrate and the target in a close-space sublimation furnace; depositing an inorganic perovskite layer onto the substrate by sublimation of the target.