公开(公告)号：US20220003803A1

公开(公告)日：2022-01-06

申请号：US17329172

申请日：2021-05-25

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Andrew Ronaldi TANDIO ,  Hung-Chan CHIANG ,  Bo-Fan TSAI

IPC: G01R29/22 ,  H01L41/257 ,  G01R29/12

Abstract: A method for monitoring polarization quality of a piezoelectric film is described. In this method, a detection step is performed on a piezoelectric film by using a detection device with a non-contact method during a polarization process of the piezoelectric film, to obtain a static electricity information or a transmittance information. A determination step is performed by using the static electricity information or the transmittance information to determine a polarization degree of the piezoelectric film.

公开(公告)号：US20210320242A1

公开(公告)日：2021-10-14

申请号：US17163585

申请日：2021-02-01

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Andrew Ronaldi TANDIO ,  Bo-Fan TSAI

IPC: H01L41/257 ,  H01L41/193 ,  H01L41/317

Abstract: A method for polarizing a piezoelectric film is described. In this method, a piezoelectric film is formed by using an injection deposition method. The piezoelectric film is flat adhered to a surface of a conductive substrate. A polarization process is performed on the piezoelectric film while the piezoelectric film is flat adhered to the surface of the conductive substrate.