公开(公告)号：US20180283451A1

公开(公告)日：2018-10-04

申请号：US15935052

申请日：2018-03-25

申请人： Carl Zeiss Industrielle Messtechnik GmbH

发明人： Malte Langmack ,  Steffen Strauss ,  Wolfgang Strauss ,  Raphael Koch ,  Christof Poglitsch ,  Holger Hofmann ,  Nikolai Zeller

IPC分类号： F16C32/06

摘要： An air bearing for movably bearing at least two elements includes a bearing main body with a first air outflow channel and a second air outflow channel. The first air outflow channel is supplied with air via at least one first air delivery device. The second air outflow channel is supplied with air via at least one second air delivery device. A sensor detects at least one of a bearing stroke, a bearing pressure, and a bearing throughflow, and a controller adjusts the supply of the air to at least one of the first air outflow channel and the second air outflow channel in accordance with the at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.

公开(公告)号：US10683894B2

公开(公告)日：2020-06-16

申请号：US15935052

申请日：2018-03-25

申请人： Carl Zeiss Industrielle Messtechnik GmbH

发明人： Malte Langmack ,  Steffen Strauss ,  Wolfgang Strauss ,  Raphael Koch ,  Christof Poglitsch ,  Holger Hofmann ,  Nikolai Zeller

IPC分类号： F16C32/06

摘要： An air bearing for movably bearing at least two elements includes a bearing main body with a first air outflow channel and a second air outflow channel. The first air outflow channel is supplied with air via at least one first air delivery device. The second air outflow channel is supplied with air via at least one second air delivery device. A sensor detects at least one of a bearing stroke, a bearing pressure, and a bearing throughflow, and a controller adjusts the supply of the air to at least one of the first air outflow channel and the second air outflow channel in accordance with the at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.