公开(公告)号：US20150083938A1

公开(公告)日：2015-03-26

申请号：US14492949

申请日：2014-09-22

申请人： Carl Zeiss Laser Optics GmbH

发明人： Willi Anderl ,  Bernhard Weigl ,  Ann-Kathrin Wandner ,  Holger Kierey ,  Arno Schmittner ,  Markus Bauer ,  Marcus Schmelzeisen ,  Andreas Kolloch

IPC分类号： H05G2/00 ,  G02B7/18 ,  F28F21/08 ,  F28D15/00 ,  F28F13/18

CPC分类号： H05G2/008 ,  F28D15/00 ,  F28F9/0256 ,  F28F21/04 ,  F28F21/081 ,  F28F2230/00 ,  F28F2265/16 ,  G02B7/1815 ,  H05G2/005

摘要： The disclosure provides a cooler for use in a plasma generation chamber of a radiation source for an extreme ultraviolet wavelength range. The cooler has a heat sink which is at least partially manufactured of a substrate material having a thermal conductivity of greater than 50 W/mK. A coolant duct is formed in the substrate material, and the coolant duct is configured to have a coolant flow therethrough. The cooler also includes a connection piece made of a metal or a metal alloy for connecting a coolant line to the coolant duct. The cooler further includes a connecting element for connecting the connection piece to the heat sink so that, when the connection piece is connected to the heat sink, a continuous line is formed by the coolant duct and the coolant line.

摘要翻译： 本公开提供一种用于远紫外线波长范围的辐射源的等离子体产生室中的冷却器。 冷却器具有至少部分地由具有大于50W / mK的热导率的基底材料制成的散热器。 在衬底材料中形成冷却剂管道，并且冷却剂管道构造成具有通过其的冷却剂流。 冷却器还包括由金属或金属合金制成的连接件，用于将冷却剂管线连接到冷却剂管道。 冷却器还包括用于将连接件连接到散热器的连接元件，使得当连接件连接到散热器时，冷却剂管道和冷却剂管线形成连续的线。