METHOD FOR CALIBRATING OPTICAL COATING APPARATUSES

    公开(公告)号:US20240076774A1

    公开(公告)日:2024-03-07

    申请号:US18505861

    申请日:2023-11-09

    IPC分类号: C23C14/54 C23C16/52

    CPC分类号: C23C14/547 C23C16/52

    摘要: A computer-implemented method of generating data for calibrating optical coating apparatuses for applying optical coatings to surfaces of substrates is disclosed. The method includes measuring spectral data of a test coating applied by an optical coating apparatus at a first location; sending a coating data file containing the spectral data to a second location; comparing the measured spectral data of the test coating to target specification data for the test coating; and determining correction factors for correcting deviations to the target specification data for the optical coating apparatus based on the comparison between the measured spectral data and the target specification data; and receiving a target data file containing the correction factors at the first location and calibrating the optical coating apparatus by adjusting an operation parameter of the optical coating apparatus based on the correction factors to correct for deviations from the target specification data.