公开(公告)号：US20200247685A1

公开(公告)日：2020-08-06

申请号：US16756058

申请日：2018-10-04

申请人： Central Glass Company, Limited

发明人： Masakiyo NAGATOMO ,  Akifumi YAO ,  Shuhei UESHIMA ,  Akiou KIKUCHI

IPC分类号： C01G41/04 ,  B01J8/02

摘要： According to the present invention, there is provided a method of producing tungsten hexafluoride by reacting tungsten with a fluorine-containing gas at a temperature of 800° C. or higher. The method according to the present invention is advantageous in that the amount of production of the tungsten hexafluoride per unit capacity of the reaction vessel is increased as compared to conventional techniques of producing tungsten hexafluoride from a fluorine-containing gas and metal tungsten while controlling the reaction temperature to 400° C. or lower. It is preferable that the reaction vessel is equipped with a coolant jacket for maintaining an inner wall temperature of the reaction vessel at 400° C. or lower.

公开(公告)号：US20210253442A1

公开(公告)日：2021-08-19

申请号：US17268848

申请日：2019-07-12

申请人： Central Glass Company, Limited

发明人： Akiou KIKUCHI ,  Yuta TAKEDA ,  Masakiyo NAGATOMO ,  Akifumi YAO

IPC分类号： C01G41/04

摘要： A production method of tungsten hexafluoride according to one embodiment of the present invention includes: a first step of bringing tungsten having an oxide film into contact with a fluorine gas or inert gas containing 50 vol ppm to 50 vol % of hydrogen fluoride in a reactor, thereby removing the oxide film from the tungsten; and a second step of bringing the tungsten from which the oxide film has been removed by the first step into contact with a fluorine-containing gas to form tungsten hexafluoride.

公开(公告)号：US20200173009A1

公开(公告)日：2020-06-04

申请号：US16625963

申请日：2018-07-24

申请人： Central Glass Company, Limited

发明人： Akifumi YAO ,  Masakiyo NAGATOMO ,  Shinya IKEDA

IPC分类号： C23C8/38 ,  F17C13/00 ,  F17C1/10

摘要： The method for producing a filled container of the present invention includes: providing a metal storage container, at least an inner surface of which is formed of a manganese steel and in which the inner surface has a surface roughness Rmax of 10 μm or less; performing fluorination by bringing the inner surface of the storage container into contact with a gas containing at least one first fluorine-containing gas selected from the group consisting of ClF3, IF7, BrF5, F2, and WF6 at 50° C. or lower; purging the inside of the storage container with an inert gas; and filling the inside of the storage container with at least one second fluorine-containing gas selected from the group consisting of ClF3, IF7, BrF5, F2, and WF6.

公开(公告)号：US20210115556A1

公开(公告)日：2021-04-22

申请号：US16630681

申请日：2018-05-31

申请人： Central Glass Company, Limited

发明人： Masakiyo NAGATOMO ,  Akifumi YAO

IPC分类号： C23C16/44 ,  B08B5/00 ,  B08B9/08 ,  B08B7/00 ,  B08B7/04 ,  C23C16/30 ,  C01G39/04 ,  C01G41/04

摘要： A treatment method for a metal oxyfluoride according to the present invention includes bringing a metal oxyfluoride of the general formula: MO(6-x)/2Fx (where 0