公开(公告)号：US20190243208A1

公开(公告)日：2019-08-08

申请号：US16268566

申请日：2019-02-06

Applicant: Cheng Peng ,  DIRK ENGLUND

Inventor： Cheng Peng ,  DIRK ENGLUND

IPC: G02F1/29

CPC classification number: G02F1/29 ,  G02F2202/30 ,  G02F2202/36 ,  G02F2203/24 ,  H01L27/092

Abstract: Modulating graphene's optical conductivity with an electrolyte nanopatterning technique reduces or eliminates scattering loss caused by rough edges from etching. This technique uses a resist mask patterned with features as small as 30 nm to shield graphene from ions in an electrolyte. It can provide a carrier density variation of about 1014 cm−2 across a length of just 15 nm. And it can be combined with a technique of growing or transferring graphene on atomically smooth hexagonal boron nitride (hBN) to increase graphene's carrier mobility, e.g., to 10,000 cm2/(V·s) or more. The resulting graphene metamaterials can be used to make voltage-tunable electro-optical devices, such as beam-steering devices, electro-optical switch and modulators, and reconfigurable holograms.