公开(公告)号：US20070128401A1

公开(公告)日：2007-06-07

申请号：US11293102

申请日：2005-12-05

申请人： Chien-Chung Kuo ,  Fu-Cheng Chou ,  Yi-Lin Chou ,  Wan-Chen Tsai ,  Ming-Chang Yu

发明人： Chien-Chung Kuo ,  Fu-Cheng Chou ,  Yi-Lin Chou ,  Wan-Chen Tsai ,  Ming-Chang Yu

IPC分类号： B32B3/00

CPC分类号： H01L27/3283 ,  Y10T428/19

摘要： The present invention discloses an electrode separator, which is formed on a substrate that has strip-like first electrodes and is perpendicular to the first electrodes, wherein a common positive type photoresist material is firstly obliquely exposed and then vertically exposed and then developed to form the electrode separator by the two exposure steps. The electrode separator has a first lateral vertical to the bottom side of the electrode separator and a second lateral cooperating with the surface of the substrate to create an acute angle with one end of the top side having an overhanging portion. When the second electrodes are deposited, the overhanging portions can separate the metallic film of the second electrodes, and the metallic film of each second electrode is confined to between two electrode separators. Thus, the objective of separating the second electrode is achieved.

摘要翻译： 本发明公开了一种电极分离体，其形成在具有带状的第一电极且与第一电极垂直的基板上，其中，首先倾斜露出普通正型光致抗蚀剂材料，然后垂直曝光，然后显影形成 电极分离器通过两个曝光步骤。 电极分离器具有垂直于电极分离器的底侧的第一横向垂直并且与基板的表面配合的第二横向以与顶侧的一端具有突出部分形成锐角。 当沉积第二电极时，突出部分可以分离第二电极的金属膜，并且每个第二电极的金属膜被限制在两个电极分离器之间。 因此，实现了分离第二电极的目的。