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公开(公告)号:US07158850B2
公开(公告)日:2007-01-02
申请号:US10172089
申请日:2002-06-14
申请人: Chien-Fei Cheng , Bruce Chen , Yuan-Ching Lu , Li-Ren Lin , Shi-Ming Wang , Pei-Chen Yeh
发明人: Chien-Fei Cheng , Bruce Chen , Yuan-Ching Lu , Li-Ren Lin , Shi-Ming Wang , Pei-Chen Yeh
IPC分类号: G06F19/00
CPC分类号: G06Q10/06
摘要: A semiconductor fabrication enterprise includes fabrication equipment, transportable containers for work—in—process and an enterprise information system. The transportable containers have associated radio frequency tags having identification codes uniquely identifying the carriers in the fabrication process. The enterprise information system contains data corresponding to each such identification code. The identification codes are read by a radio frequency interrogation device, and the radio frequency interrogation device carries out transactions with the enterprise data system to transfer the data corresponding to the identification codes to the radio frequency interrogation device. The radio frequency tags may be adapted for read/write functionality allowing for writing data to the radio frequency tags and synchronization of radio frequency tag data and enterprise information system data.
摘要翻译: 半导体制造企业包括制造设备,在制品运输容器和企业信息系统。 可移动容器具有相关联的射频标签,其具有唯一地识别制造过程中的载体的识别码。 企业信息系统包含与每个这样的识别码对应的数据。 识别码由射频询问装置读取,射频询问装置与企业数据系统进行交易,将与识别码对应的数据传送给射频询问装置。 射频标签可以适于读/写功能,允许向射频标签写入数据,并且对射频标签数据和企业信息系统数据进行同步。