Contact pressure sensor
    1.
    发明授权
    Contact pressure sensor 失效
    接触式压力传感器

    公开(公告)号:US5179956A

    公开(公告)日:1993-01-19

    申请号:US721317

    申请日:1991-06-26

    IPC分类号: A61B5/022

    CPC分类号: A61B5/02233 Y10S73/04

    摘要: A contact pressure sensor including a semiconductor chip having opposite surfaces, at least one pressure sensing element provided in one of the opposite surfaces of the chip, a spacer member supporting the other surface of the chip, a substrate having a surface to which the spacer member is fixed, the one surface of the chip being pressed against an object which produces a pressure, so that the at least one sensing element detects the pressure produced by the object, a first connection terminal provided in the one surface of the chip, a second connection terminal provided in the surface of the substrate, and a flexible flat cable connecting between the first and second connection terminals, the flexible flat cable being bent into two portions one of which extends along a side surface of the spacer member and the other of which extends along the surface of the substrate. The contact pressure sensor may further comprise a light-shading layer covering the one surface of the chip in which the at least one pressure sensing element is provided.

    摘要翻译: 一种接触压力传感器,包括具有相反表面的半导体芯片,设置在芯片的相对表面之一中的至少一个压力感测元件,支撑芯片的另一个表面的间隔件,具有表面的基板,间隔件 被固定,芯片的一个表面被压在产生压力的物体上,使得至少一个感测元件检测由物体产生的压力,设置在芯片的一个表面中的第一连接端子,第二 连接端子,以及连接在第一和第二连接端子之间的柔性扁平电缆,柔性扁平电缆被弯曲成两个部分,其中一个沿着间隔件的侧表面延伸,另一个 沿着衬底的表面延伸。 接触压力传感器还可以包括覆盖芯片的一个表面的遮光层,其中提供至少一个压力感测元件。