公开(公告)号：US20200319049A1

公开(公告)日：2020-10-08

申请号：US16098438

申请日：2018-06-22

Applicant: Chuandong Magnetic Electronics Co., Ltd.. ,  SOUTHEAST UNIVERSITY

Inventor： Ming QING ,  ZhenJun WANG ,  KeWen LONG ,  HuaJuan HE

IPC: G01L13/02 ,  G01L9/00

Abstract: A double-membrane capacitive pressure sensor comprising a glass substrate, wherein a shallow groove is formed in the center of the glass substrate; a shallow groove through-hole is formed in the center of the shallow groove, and the shallow groove through-hole extends from the bottom surface of the shallow groove to the bottom surface of the glass substrate; a capacitor C1 capable of measuring the low-pressure difference and a capacitor C2 capable of measuring the high-pressure difference are arranged above the shallow groove; the capacitor C1 capable of measuring the low-pressure difference comprises a bottom electrode plate and a thin pressure sensitive membrane, and the capacitor C2 capable of measuring the high-pressure difference comprises a thick pressure sensitive membrane and a top electrode plate;