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公开(公告)号:US09437823B2
公开(公告)日:2016-09-06
申请号:US14446464
申请日:2014-07-30
Inventor: Suk Tai Chang , Yeongun Ko
CPC classification number: H01L51/0045 , B05C5/0208 , B05C11/026 , C01B32/192 , H01L29/1606 , H01L29/7781 , H01L31/1884 , Y02E10/50
Abstract: The present invention relates to a production device for graphene thin film. The production device for graphene thin film according to the present invention may comprise a deposition plate in contact with a substrate at an obtuse or acute angle, wherein the substrate is coated with a graphene oxide solution; and a reciprocating linear motion device connected to the deposition plate to put the deposition plate into reciprocating linear motion.
Abstract translation: 本发明涉及石墨烯薄膜的制造装置。 根据本发明的用于石墨烯薄膜的生产装置可以包括以钝角或锐角与基底接触的沉积板,其中所述基底涂覆有氧化石墨烯溶液; 以及连接到沉积板的往复直线运动装置,以将沉积板进行往复直线运动。
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公开(公告)号:US20140331920A1
公开(公告)日:2014-11-13
申请号:US14446464
申请日:2014-07-30
Inventor: Suk Tai Chang , Yeongun Ko
IPC: B05C5/02
CPC classification number: H01L51/0045 , B05C5/0208 , B05C11/026 , C01B32/192 , H01L29/1606 , H01L29/7781 , H01L31/1884 , Y02E10/50
Abstract: The present invention relates to a production device for graphene thin film. The production device for graphene thin film according to the present invention may comprise a deposition plate in contact with a substrate at an obtuse or acute angle, wherein the substrate is coated with a graphene oxide solution; and a reciprocating linear motion device connected to the deposition plate to put the deposition plate into reciprocating linear motion.
Abstract translation: 本发明涉及石墨烯薄膜的制造装置。 根据本发明的用于石墨烯薄膜的生产装置可以包括以钝角或锐角与基底接触的沉积板,其中所述基底涂覆有氧化石墨烯溶液; 以及连接到沉积板的往复直线运动装置,以将沉积板进行往复直线运动。
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