FABRICATION OF PIEZOELECTRIC TRANSDUCER INCLUDING INTEGRATED TEMPERATURE SENSOR

    公开(公告)号:US20200314538A1

    公开(公告)日:2020-10-01

    申请号:US16903044

    申请日:2020-06-16

    Abstract: A method of fabricating a piezoelectric transducer may include interleaving a plurality of layers of piezoelectric material with a plurality of conductive layers including a first conductive layer, one or more second conductive layers, and one or more third conductive layers, coupling the first conductive layer to a first electrode, wherein an electrical impedance of the first conductive layer varies as a function of a temperature internal to the piezoelectric transducer, and such that a measurement signal indicative of the electrical impedance is generated at the first electrode, coupling the one or more second conductive layers to a second electrode, and coupling the one or more third conductive layers to a third electrode, such that an electrical driving signal driven to the second electrode and the third electrode causes mechanical vibration of the piezoelectric transducer as a function of the electrical driving signal.

    FABRICATION OF PIEZOELECTRIC TRANSDUCER INCLUDING INTEGRATED TEMPERATURE SENSOR

    公开(公告)号:US20190268696A1

    公开(公告)日:2019-08-29

    申请号:US16287235

    申请日:2019-02-27

    Abstract: A method of fabricating a piezoelectric transducer may include interleaving a plurality of layers of piezoelectric material with a plurality of conductive layers including a first conductive layer, one or more second conductive layers, and one or more third conductive layers, coupling the first conductive layer to a first electrode, wherein an electrical impedance of the first conductive layer varies as a function of a temperature internal to the piezoelectric transducer, and such that a measurement signal indicative of the electrical impedance is generated at the first electrode, coupling the one or more second conductive layers to a second electrode, and coupling the one or more third conductive layers to a third electrode, such that an electrical driving signal driven to the second electrode and the third electrode causes mechanical vibration of the piezoelectric transducer as a function of the electrical driving signal.

Patent Agency Ranking