Compact micro electrical mechanical actuated ring-resonator

    公开(公告)号:US11698487B2

    公开(公告)日:2023-07-11

    申请号:US17453780

    申请日:2021-11-05

    CPC classification number: G02B6/12007 G02B6/29338 G02B2006/12107

    Abstract: A compact micro electrical mechanical actuated ring-resonator includes a bus waveguide disposed on a platform; a ring resonator disposed on the platform, including at least a first optical coupler, wherein the ring resonator is optically coupled with the bus waveguide; and a selective waveguide disposed on a piezoelectric cantilever mounted in a trench defined in the platform, wherein the selective waveguide includes a second optical coupler and is controllable to selectively adjust a coupling ratio between the first optical coupler with the second optical coupler by physically changing a distance between the first optical coupler and the second optical coupler.

Patent Agency Ranking