公开(公告)号：US5640240A

公开(公告)日：1997-06-17

申请号：US185845

申请日：1994-06-27

申请人： Clive Butler ,  Gregorios Gregoriou

发明人： Clive Butler ,  Gregorios Gregoriou

IPC分类号： G01B11/24 ,  G01B11/245 ,  G01B11/30 ,  G01B11/14

CPC分类号： G01B11/303

摘要： A surface-measuring apparatus comprising a probe and means for moving the probe towards and away from a surface under examination and for monitoring such movement, the probe comprising a plurality of closely spaced light-collecting elements arranged in a light-collecting plane, lens means positioned to produce a sharply focussed image of said light collecting elements at an image plane movable relative to said surface by movement of the probe, illuminating means so arranged that the lens unit forms an illuminated spot image of it in the image plane in co-incidence with the image In the image plane of one of the light-collecting elements, and means for measuring the incidence of light on the said one of the light-collecting elements and on surrounding ones of those elements. In one embodiment (FIG. 1) the probe incorporates a bundle of, say, seven optical fibers which each have one end exposed at an end plane of the bundle and constituting a respective one the light-collecting elements, the fibers being connected at their other ends to photodiodes or other photodetector means for measuring the Incidence of light on the exposed ends of the fibers. In another embodiment, the light-collecting elements are the individual detector cells comprised in the detector array of a solid state camera, the cells being organized in groups each having a central cell and a plurality of surrounding cells, and the illuminating means may be a screen with appropriately located apertures illuminated from behind.

摘要翻译： PCT No.PCT / GB92 / 01373 Sec。 371日期1994年6月27日第 102（e）日期1994年6月27日PCT提交1992年7月24日PCT公布。 公开号WO93 / 02337 日期：1993年2月4日一种包括探针的表面测量装置和用于将探针朝着和离开被检查表面移动并用于监测这种移动的装置，该探针包括多个紧密排列的聚光元件， 收集平面，透镜装置被定位成通过探头的移动在相对于所述表面可移动的图像平面上产生所述聚光元件的锐利聚焦图像，照明装置被布置成使得透镜单元在图像中形成其照明的斑点图像 与所述图像共成像的平面在所述聚光元件之一的像面中，以及用于测量所述一个所述光收集元件上的所述一个和所述元件周围的光的入射的装置。 在一个实施例（图1）中，探针包括一束，例如七根光纤，每束光纤的一端在光束的端面处露出，并且构成相应的一个光收集元件，光纤在它们的连接处 另一端到光电二极管或其他光电检测器装置，用于测量光纤暴露端上的发光率。 在另一个实施例中，光收集元件是包括在固态照相机的检测器阵列中的各个检测器单元，该单元被组织成各自具有中心单元和多个周围单元，并且该照明装置可以是 屏幕具有从后面照明的适当定位的孔。