公开(公告)号：US20040130341A1

公开(公告)日：2004-07-08

申请号：US10721408

申请日：2003-11-26

申请人： Communications Res., Lab., Ind. Admin. Inst.

发明人： Tetsuya Kawanishi ,  Yoshiro Matsuo ,  Masayuki Izutsu

IPC分类号： G01R031/308

CPC分类号： G01R31/311

摘要： A method and apparatus are provided that make it possible to speedily measure, and obtain images of, the three-dimensional distribution of electric fields in integrated circuits, using electro-optic sampling. The sampling is performed using a plurality of electric field sensors, each comprising an electro-optic crystal layer, a light-reflecting layer that is in close contact with the electro-optic crystal layer, and a separation layer that is in close contact with the reflection layer, separating the reflection layer from the object to be measured.

摘要翻译： 提供了一种方法和装置，其可以使用电光采样来快速测量和获得集成电路中的电场的三维分布的图像。 使用多个电场传感器进行采样，每个电场传感器包括电光晶体层，与电光晶层紧密接触的光反射层和与该电光晶体层紧密接触的分离层 反射层，将反射层与被测量物体分开。