Shear transverse wave device having selective trapping of wave energy
    1.
    发明授权
    Shear transverse wave device having selective trapping of wave energy 失效
    具有选择性捕获波能的剪切横波装置

    公开(公告)号:US5220234A

    公开(公告)日:1993-06-15

    申请号:US844360

    申请日:1992-03-02

    IPC分类号: G01H11/00 H03H9/02 H03H9/145

    CPC分类号: H03H9/02842

    摘要: A shear transverse wave device having transitions in the relaxation or tightening of wave trapping. Two embodiments are preferably utilized simultaneously. A first embodiment involves wave trapping fingers disposed within a propagation region between a transmitting and a receiving interdigital transducer. The wave trapping fingers provide a high width-to-spacing ratio of fingers proximate to the transducers and provide a lower ratio with approach to a center of the propagation region. The relaxed trapping reduces the adverse effects caused by surface perturbations, while the tight trapping at the transducers provides an efficient coupling of power to and from the device. The second embodiment is likewise concerned with decoupling of power. Absorptive film is placed at the opposed edges of the device to suppress spurious reflections from the edges. A grating of fingers between each transducer and the associated edge is designed to provide a tightening of trapping with departure from the transducers, thereby allowing a more efficient absorption by the absorptive film, which is deposited on the fingers closest to the opposed edges. Again, the width-to-spacing ratio is varied to achieve the increase in wave trapping.

    Polyimide damper for surface acoustic wave device
    4.
    发明授权
    Polyimide damper for surface acoustic wave device 失效
    用于表面声波装置的聚酰亚胺阻尼器

    公开(公告)号:US4931752A

    公开(公告)日:1990-06-05

    申请号:US103559

    申请日:1987-09-30

    IPC分类号: H03H9/25 H03H3/08 H03H9/02

    CPC分类号: H03H9/02842 Y10T29/42

    摘要: A surface acoustic wave (SAW) device is provided which includes a piezoelectric substrate, an input transducer formed on the substrate for launching acoustic surface waves along a propagation path on the substrate, an output transducer formed on the substrate across the propagation path from the input transducer for receiving acoustic surface waves generated by the input transducer, and at least one area of acoustic energy absorbing material, preferably polyimide, formed on the substrate between the edge of the substrate and a corresponding transducer. The acoustic absorber is patterned on the SAW device substrate while the device is still in wafer form using photolithographic processing techniques.

    摘要翻译: 提供了一种表面声波(SAW)器件,其包括压电基片,形成在基片上的输入换能器,用于沿着基片上的传播路径发射声表面波;形成在基底上的输出变换器, 用于接收由输入换能器产生的声表面波的传感器,以及形成在基板的边缘和相应的换能器之间的衬底上的至少一个能量吸收材料(优选聚酰亚胺)的区域。 在SAW器件衬底上图案化吸声器,同时器件仍然使用光刻处理技术处于晶片形式。