公开(公告)号：US20220120597A1

公开(公告)日：2022-04-21

申请号：US17565049

申请日：2021-12-29

Applicant: DENSO CORPORATION

Inventor： Hajime MASHITA ,  Yasushi KOUNO ,  Jyunzou YAMAGUCHI

IPC: G01F1/692

Abstract: A thin film is formed on a substrate on which an opening having two opposite sides are formed, and forms a membrane. The thin film has an upstream temperature sensor and a downstream temperature sensor on both sides of a heater. A heat conductive member covers the two sides and is arranged on both sides of the heater, the upstream temperature sensor, and the downstream temperature sensor so as to promote heat conduction from the heater to the substrate. When an end of the opening on the membrane side is defined as an upper end and an end on the side away from the membrane is defined as a lower end, the heat conductive member covers from the upper end to the lower end of the opening in a normal direction of the membrane.