Surface plasmon optic devices and radiating surface plasmon sources for photolithography
    2.
    发明授权
    Surface plasmon optic devices and radiating surface plasmon sources for photolithography 有权
    表面等离子体光学器件和用于光刻的辐射表面等离子体源

    公开(公告)号:US07359598B2

    公开(公告)日:2008-04-15

    申请号:US10494814

    申请日:2001-11-10

    IPC分类号: G02B6/26 G02B6/42

    摘要: Disclosed is a surface plasmon optic device that has a periodic array of apertures in a dielectric substrate and a metal film formed on the dielectric substrate and emits light from metal-air interface. The surface plasmon optic device includes a surface plasmon generating apparatus, a surface plasmon detecting apparatus, a surface plasmon controlling apparatus, an etching apparatus, etc. if a metal diffraction grating is disposed on the metal film having a well-defined interface, propagation of the surface plasmon can be efficiently reflected, divided and controlled. Further, radiating surface plasmon having a half period of a lattice constant formed at air-metal (1, 0) can be preserved at a distance of at least a few micron.

    摘要翻译: 公开了一种表面等离子体激元光学器件,其在电介质基底中具有周期性的孔阵列,并且在电介质基底上形成金属膜,并从金属 - 空气界面发射光。 如果将金属衍射光栅设置在具有界定良好界面的金属膜上,则表面等离子体激元装置包括表面等离子体激元产生装置,表面等离子体激元检测装置,表面等离子体激元控制装置,蚀刻装置等。 可以有效地反射,分割和控制表面等离子体激元。 此外,具有在空气 - 金属(1,0)处形成的晶格常数的半周期的辐射表面等离子体可以保持在至少几微米的距离处。