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1.发明授权Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems 有权集成工具，可互换的湿加工部件，用于加工微型工件和自动校准系统公开(公告)号：US07198694B2
公开(公告)日：2007-04-03
申请号：US10861240
申请日：2004-06-03
申请人： Daniel J. Woodruff , Jeffry Alan Davis , Randy A. Harris , David P. Mattson , James J. Erickson , Matthew C. Egloff
发明人： Daniel J. Woodruff , Jeffry Alan Davis , Randy A. Harris , David P. Mattson , James J. Erickson , Matthew C. Egloff
IPC分类号： C23F1/00 , H01L21/306 , C25C7/00 , B05C9/00
CPC分类号： H01L21/6719
摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
摘要翻译： 集成的工具和自动校准系统，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。
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2.发明授权Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces 失效具有自动校准系统的集成工具和可互换的湿加工部件，用于加工微型工件公开(公告)号：US07313462B2
公开(公告)日：2007-12-25
申请号：US10860385
申请日：2004-06-03
IPC分类号： G06F19/00
CPC分类号： H01L21/6723 , B01D61/425 , C25D17/00 , H01L21/67005 , H01L21/6719 , H01L21/67742 , H01L21/68707
摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
摘要翻译： 集成的工具和自动校准系统，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。
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