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公开(公告)号:US4545153A
公开(公告)日:1985-10-08
申请号:US560417
申请日:1983-12-12
CPC分类号: B24B37/08
摘要: An apparatus for measuring and controlling the force exerted on a disc by a rotating pad. More specifically, the present invention relates to an apparatus for controlling the forces exerted by a plurality of polishing pads used for polishing the surfaces of rigid computer memory discs. The spring mechanism that provides the load force to a free sliding shaft which transmits the force to the polishing member is fitted with a suitable transducer, such as a strain gauge, which senses the axial force transmitted down the sliding shaft to the polishing pads by way of the force/strain relationship of the spring mechanism. The strain sensed by the transducer is converted to an electrial signal which is conducted to the input of a closed loop, feedback control servo system which maintains the desired contact force of the pads on the disc and, at the same time, maintains an equality of forces on each side of the disc.
摘要翻译: 一种用于通过旋转垫测量和控制施加在盘上的力的装置。 更具体地,本发明涉及一种用于控制由用于抛光刚性计算机存储盘的表面的多个抛光垫施加的力的装置。 向向抛光构件传递力的自由滑动轴提供载荷力的弹簧机构装配有合适的换能器,例如应变计,其感应通过滑动轴向下传递到抛光垫的轴向力 的力/应变关系的弹簧机构。 由换能器感测到的应变被转换成电信号,该电信号被传导到闭环的反馈控制伺服系统的输入端,反馈控制伺服系统保持焊盘在盘上的期望的接触力,并且同时维持 力量在光盘的每一边。
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2.
公开(公告)号:US4620359A
公开(公告)日:1986-11-04
申请号:US551254
申请日:1983-11-14
申请人: Richard J. Charlton , Leland R. Krueger , Richard M. Noling , Jimmy G. Saunders , Richard J. Elliott
发明人: Richard J. Charlton , Leland R. Krueger , Richard M. Noling , Jimmy G. Saunders , Richard J. Elliott
CPC分类号: G11B23/0021 , B23Q1/5406 , B23Q39/042 , B29D17/005 , Y10T29/49764 , Y10T29/49995 , Y10T29/51 , Y10T29/5109 , Y10T29/5129 , Y10T29/5176 , Y10T29/519 , Y10T29/53013 , Y10T29/53022 , Y10T29/53039 , Y10T29/53404 , Y10T29/53539
摘要: A method and an apparatus for manufacturing rigid computer memory disc substrates is disclosed wherein the apparatus comprises a circular base plate, the base plate being mounted horizontally for rotation about a vertical axis; a plurality of spindles rotatably mounted on motors mounted on the base plate, the spindles extending radially outwardly from the base plate, in equally spaced relationship therearound, the outwardly extending end of each spindle including a fastening means for mounting a rigid disc to be processed thereon; a plurality of work stations spaced around the circular base plate for performing work operations on the discs; and a motor for rotating the base plate so as to convey each of the discs consecutively to each of the work stations.
摘要翻译: 公开了一种用于制造刚性计算机存储盘基片的方法和装置,其中所述装置包括圆形底板,所述底板水平安装以围绕垂直轴线旋转; 多个主轴可旋转地安装在安装在基板上的马达上,主轴从基板以等间隔的关系径向向外延伸,每个主轴的向外延伸端包括用于安装要在其上处理的刚性盘的紧固装置 ; 围绕所述圆形基板间隔开的多个工作台,用于对所述盘进行工作操作; 以及用于使基板旋转以将每个盘连续地传送到每个工作站的电动机。
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