Force sensor for controlling polishing pad pressure
    1.
    发明授权
    Force sensor for controlling polishing pad pressure 失效
    用于控制抛光垫压力的力传感器

    公开(公告)号:US4545153A

    公开(公告)日:1985-10-08

    申请号:US560417

    申请日:1983-12-12

    IPC分类号: B24B37/08 B24B7/04

    CPC分类号: B24B37/08

    摘要: An apparatus for measuring and controlling the force exerted on a disc by a rotating pad. More specifically, the present invention relates to an apparatus for controlling the forces exerted by a plurality of polishing pads used for polishing the surfaces of rigid computer memory discs. The spring mechanism that provides the load force to a free sliding shaft which transmits the force to the polishing member is fitted with a suitable transducer, such as a strain gauge, which senses the axial force transmitted down the sliding shaft to the polishing pads by way of the force/strain relationship of the spring mechanism. The strain sensed by the transducer is converted to an electrial signal which is conducted to the input of a closed loop, feedback control servo system which maintains the desired contact force of the pads on the disc and, at the same time, maintains an equality of forces on each side of the disc.

    摘要翻译: 一种用于通过旋转垫测量和控制施加在盘上的力的装置。 更具体地,本发明涉及一种用于控制由用于抛光刚性计算机存储盘的表面的多个抛光垫施加的力的装置。 向向抛光构件传递力的自由滑动轴提供载荷力的弹簧机构装配有合适的换能器,例如应变计,其感应通过滑动轴向下传递到抛光垫的轴向力 的力/应变关系的弹簧机构。 由换能器感测到的应变被转换成电信号,该电信号被传导到闭环的反馈控制伺服系统的输入端,反馈控制伺服系统保持焊盘在盘上的期望的接触力,并且同时维持 力量在光盘的每一边。