公开(公告)号：US08767199B2

公开(公告)日：2014-07-01

申请号：US12905472

申请日：2010-10-15

申请人： David M. Dozor ,  Yullin Kim ,  Kris Tumidajski ,  Gary Fancher ,  Ken Salvestrini ,  Douglas Holt ,  Ron DeWitt, Jr.

发明人： David M. Dozor ,  Yullin Kim ,  Kris Tumidajski ,  Gary Fancher ,  Ken Salvestrini ,  Douglas Holt ,  Ron DeWitt, Jr.

IPC分类号： G11B7/12 ,  G02B7/02

CPC分类号： G02B21/33

摘要： An inspection system including a lens. In one instance, the lens is a solid immersion lens. The inspection system includes a component or components for providing a self aligning solid immersion lens arrangement in order to allow at most a small distance between the solid immersion lens and a device under test and components or components for constraining a force exerted on the device under test. The inspection system may include a “purge” port, or a thermal isolation configuration or an anti-contamination component. The inspection system may include software and hardware to prevent crashing of the lens. The inspection system may also include a method for ensuring that various objective lenses can be replaced while maintaining the intended spacing between lenses.

摘要翻译： 包括透镜的检查系统。 在一种情况下，透镜是固体浸没透镜。 检查系统包括用于提供自对准固体浸没透镜布置的部件或部件，以便允许固体浸没透镜和被测器件之间的至少一定距离，以及用于约束施加在被测器件上的力的部件或部件 。 检查系统可以包括“吹扫”端口，或热隔离构造或抗污染部件。 检查系统可以包括软件和硬件，以防止镜头的撞击。 检查系统还可以包括一种用于确保在保持透镜之间的预定间隔的同时更换各种物镜的方法。

公开(公告)号：US20120092655A1

公开(公告)日：2012-04-19

申请号：US12905472

申请日：2010-10-15

申请人： David M. Dozor ,  Yullin Kim ,  Kris Tumidajski ,  Gary Fancher ,  Ken Salvestrini ,  Douglas Holt ,  Ron DeWitt, JR.

发明人： David M. Dozor ,  Yullin Kim ,  Kris Tumidajski ,  Gary Fancher ,  Ken Salvestrini ,  Douglas Holt ,  Ron DeWitt, JR.

IPC分类号： G01N21/88 ,  G02B27/56 ,  G02B7/02

CPC分类号： G02B21/33

摘要： An inspection system including a lens. In one instance, the lens is a solid immersion lens. The inspection system includes a component or components for providing a self aligning solid immersion lens arrangement in order to allow at most a small distance between the solid immersion lens and a device under test and components or components for constraining a force exerted on the device under test. The inspection system may include a “purge” port, or a thermal isolation configuration or an anti-contamination component. The inspection system may include software and hardware to prevent crashing of the lens. The inspection system may also include a method for ensuring that various objective lenses can be replaced while maintaining the intended spacing between lenses.

摘要翻译： 包括透镜的检查系统。 在一种情况下，透镜是固体浸没透镜。 检查系统包括用于提供自对准固体浸没透镜布置的部件或部件，以便允许固体浸没透镜和被测器件之间的至少一定距离，以及用于约束施加在被测器件上的力的部件或部件 。 检查系统可以包括“吹扫”端口，或热隔离构造或抗污染部件。 检查系统可以包括软件和硬件，以防止镜头的撞击。 检查系统还可以包括一种用于确保在保持透镜之间的预定间隔的同时更换各种物镜的方法。