专利检索 ap:("David R. Johnson" OR "Joe Lee Phillip" OR "Todd C. Nielsen" OR "Robert J. Hatfield") AND inv:"Joe Lee Phillip" 第 1 页

1.

发明授权
Method and apparatus employing external light source for endpoint detection 有权

公开(公告)号：US06509960B2

公开(公告)日：2003-01-21

申请号：US09796232

申请日：2001-02-28

申请人： David R. Johnson , Joe Lee Phillip , Todd C. Nielsen , Robert J. Hatfield

发明人： David R. Johnson , Joe Lee Phillip , Todd C. Nielsen , Robert J. Hatfield

IPC分类号： G01B1100

CPC分类号： H01L21/67253 , G01N21/55 , G01N21/64 , G01N21/6489 , H01J37/32935 , H01J2237/335

摘要： A method and apparatus for endpoint detection for the stripping of a particular material, such as photo-resist material, from a substrate surface. A beam of light is projected onto the substrate surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a control mechanism which determines the proper disposition of the substrate. The control mechanism controls the cessation of the stripping process and may control a substrate-handling device which sequentially transfers substrates to and from a stripping chamber.