专利检索 ap:("Dean JENNINGS" OR "Timothy N. THOMAS" OR "Stephen MOFFATT" OR "Jiping LI" OR "Bruce E. ADAMS" OR "Samuel C. HOWELLS") AND inv:"Samuel C. HOWELLS" 第 1 页

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发明申请
METHOD AND APPARATUS FOR DECORRELATION OF SPATIALLY AND TEMPORALLY COHERENT LIGHT 有权

公开(公告)号：US20130141788A1

公开(公告)日：2013-06-06

申请号：US13753305

申请日：2013-01-29

申请人： Dean JENNINGS , Timothy N. THOMAS , Stephen MOFFATT , Jiping LI , Bruce E. ADAMS , Samuel C. HOWELLS

发明人： Dean JENNINGS , Timothy N. THOMAS , Stephen MOFFATT , Jiping LI , Bruce E. ADAMS , Samuel C. HOWELLS

IPC分类号： G02B27/28

CPC分类号： G02B27/28 , G02B27/283 , G02B27/48

摘要： A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.