公开(公告)号：US20210198799A1

公开(公告)日：2021-07-01

申请号：US17135557

申请日：2020-12-28

申请人： Doctech limited

发明人： Wei-Ting WANG ,  Shien-Ping FENG ,  Yu-Ting HUANG ,  Sheng-Jye CHERNG ,  Chih-Chun CHUNG

IPC分类号： C25D3/38 ,  H01B5/00 ,  C25D7/12

摘要： A nano-twinned crystal film and a method thereof are disclosed. The method of fabricating a nano-twinned crystal film includes utilizing an electrolyte solution including copper salt, acid, and a water or alcohol-soluble organic additive, and performing electrodeposition, under conditions of a current density of 20˜100 mA/cm2, a voltage of 0.2˜1.0V, and a cathode-anode distance of 10˜300 mm, to form the nano-twinned crystal film on a surface at the cathode. The nano-twinned crystal film formed by the method includes a plurality of nano-twinned copper grains and a region of random crystal phases between some of adjacent nano-twinned copper grains, wherein at least some of the nano-twinned copper grains have a pillar cap configuration with a wide top and a narrow bottom.