摘要:
A discretely controlled micromirror device provides multiple motions of a micromirror using stepper plate and micromirror bottom support. The discretely controlled micromirror device can be controlled in a low driving voltage. Also, simple motion control is applied by digital controlling and only single voltage is needed for driving the micromirror motion.
摘要:
A discretely controlled micromirror device provides multiple motions of a micromirror using stepper plate and micromirror bottom support. The discretely controlled micromirror device can be controlled in a low driving voltage. Also, simple motion control is applied by digital controlling and only single voltage is needed for driving the micromirror motion.
摘要:
The present invention discloses a micromirror device with multi-axis rotational and translational motion. Newly introduced structure of the top electrode plate improves structural stability, flexibility, and more motion efficiency of the micromirror device. The invention also improves controllability of micromirror motion by designing the appropriate flexible structure to generate desired motion. With side-by-side arrangement of the micromirror devices, the micromirror devices are built as an array to form a micromirror array lens.
摘要:
This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.
摘要:
The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.
摘要:
The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.
摘要:
This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.
摘要:
An automatic focusing system comprises at least one micromirror array lens, an image sensor, and a signal processor. The micromirror array lens images an object and focuses the image on the image sensor. The image sensor receives the light and converts the photo energy of the light to electrical energy in the form of an electrical signal. The image sensor sends the electrical signal, which carries image data concerning the object, to the signal processor. The signal processor receives the electrical signal, compares the image quality of the image data to its focus criteria, and generates a control signal, which it sends to the micromirror array lens to adjust the focal length of the micromirror array lens. This iterative process is continued until the quality of the image data meets the focus criteria, and the process is completed within the afterimage speed of the human eye.
摘要:
A vibration correction device in an imaging device includes a micromirror array lens, configured to focus an object image onto an image sensor, and a vibration determination device, communicatively coupled to the micromirror array lens, configured to determine vibration of the imaging device and to generate a vibration correction signal. The micromirror array lens is adjusted to change its optical axis based at least in part on the vibration correction signal to correct for the vibration of the micromirror array lens. In one aspect, the micromirror array lens includes a plurality of micromirrors and the optical axis is changed by translation and/or rotation of the plurality of micromirrors. The advantages of the present invention include elimination of need for mechanical macromotions to adjust the optical axis, high sampling rate, simple structure, and flexibility to use any type of vibration determination device.
摘要:
This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a Variable Supports Discretely Controlled Micromirror (VSDCM), which has a larger displacement range than the conventional electrostatic micromirror. The displacement accuracy of the VSDCM is better than that of the conventional electrostatic micromirror and the low driving voltage is compatible with IC components. The second type of DCM, the Segmented Electrode Discretely Controlled Micromirror (SEDCM) has same disadvantages with the conventional electrostatic micromirror. But the SEDCM is compatible with known microelectronics technologies.