公开(公告)号：US20050219518A1

公开(公告)日：2005-10-06

申请号：US10511092

申请日：2003-09-08

申请人： Doron Korngut ,  Erez Admoni ,  Ofer Kadar ,  Lev Haikoviz ,  Haim Feldman ,  Avishay Guetta

发明人： Doron Korngut ,  Erez Admoni ,  Ofer Kadar ,  Lev Haikoviz ,  Haim Feldman ,  Avishay Guetta

IPC分类号： G01N21/47 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G02B27/48

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.

摘要翻译： 用于检查样品的装置包括辐射源，其适于将光辐射引导到样品表面的区域上，以及多个图像传感器。 每个图像传感器被配置为将从该区域散射的辐射接收到不同的相应角度范围中，以便形成该区域的相应图像。 图像处理器适于处理各个图像中的至少一个，以便检测表面上的缺陷。

公开(公告)号：US07339661B2

公开(公告)日：2008-03-04

申请号：US10511092

申请日：2003-09-08

申请人： Doron Korngut ,  Erez Admoni ,  Ofer Kadar ,  Lev Haikoviz ,  Haim Feldman ,  Avishay Guetta

发明人： Doron Korngut ,  Erez Admoni ,  Ofer Kadar ,  Lev Haikoviz ,  Haim Feldman ,  Avishay Guetta

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.

摘要翻译： 用于检查样品的装置包括辐射源，其适于将光辐射引导到样品表面的区域上，以及多个图像传感器。 每个图像传感器被配置为将从该区域散射的辐射接收到不同的相应的角度范围中，以便形成该区域的相应图像。 图像处理器适于处理各个图像中的至少一个，以便检测表面上的缺陷。