公开(公告)号：US20250138111A1

公开(公告)日：2025-05-01

申请号：US18495019

申请日：2023-10-26

Applicant: EAGLE TECHNOLOGY, LLC

Inventor： SCOTT RAUSCHER ,  HALEY STUMVOLL ,  JAMES DRAKES ,  FRASER R. DALGLEISH ,  DONNA M. KOCAK ,  NICHOLAS ALBAN

IPC: G01R33/032 ,  B81B7/02 ,  G01R33/00 ,  G01R33/26

Abstract: A sensing system may include a microelectromechanical system (MEMS) device that may include a MEMS substrate having a resonator cavity formed therein, at least one MEMS resonator beam carried by the MEMS substrate within the resonator cavity, and a diamond layer carried by the substrate above the resonator cavity. The diamond layer may include at least one nitrogen vacancy center (NVC) aligned with the at least one MEMS resonator beam. A resonator drive circuit may be coupled to drive the at least one MEMS resonator beam. A sensing circuit may be associated with the at least one nitrogen vacancy center to infer small changes in a magnetic field acceleration from phase perturbations in local magnetic field resonance.