公开(公告)号：US09782606B2

公开(公告)日：2017-10-10

申请号：US15082685

申请日：2016-03-28

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Hyung Ju Park ,  Moon Youn Jung ,  Won Bae Cho ,  Ji Su Lee

IPC: G21K5/04 ,  A61N5/10 ,  H05H6/00

CPC classification number: A61N5/10 ,  A61N5/1049 ,  A61N5/1075 ,  A61N2005/1072 ,  A61N2005/1074 ,  A61N2005/1088 ,  G21K5/04 ,  H05H6/00 ,  H05H2245/122

Abstract: Provided herein is an integrated target structure for generating charged particles. The integrated target structure according to an embodiment of the present disclosure includes a target layer emitting charged particles depending on an irradiation of a laser beam, an optical component controlling at least one of the laser beam and the charged particles, and a support body supporting the target layer and the optical component using one structure.