公开(公告)号：US20230073881A1

公开(公告)日：2023-03-09

申请号：US17852173

申请日：2022-06-28

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Hyun Soo KIM ,  Duk Jun Kim ,  Dong-Young Kim ,  Ho Sung Kim ,  Youngsoon Baek ,  Jang Uk Shin ,  Young-Tak Han ,  Won Seok Han

IPC: G02F1/21 ,  G02F1/225

Abstract: Disclosed are a Mach-Zehnder interferometric optical modulator and a method for manufacturing the same. The modulator includes first and second lower clad layers, a core layer, an upper clad layer, a waveguide, and electrodes. The waveguide may include an input waveguide, a waveguide divider, branch waveguides, and a waveguide combiner. Each of the branch waveguides includes first and second connection regions connected to the waveguide combiner and the waveguide divider, respectively, and a phase shift region having a cross-section of a reverse mesa structure that has an upper width that is the same as widths of the first and second connection regions and a lower width that is smaller than the widths of the first and second connection regions.