公开(公告)号：US11785701B2

公开(公告)日：2023-10-10

申请号：US17920506

申请日：2021-05-07

Applicant: EMD CORPORATION

Inventor： Akinori Ebe

IPC: H05H1/24

CPC classification number: H05H1/2439 ,  H05H1/2425

Abstract: A plasma generator includes an AC power supply, a power supply electrode and a ground electrode, one of which is disposed in a gas flow path and the other of which is a conductive wall constituting the gas flow path, an inflexible connection member configured to electrically connect the AC power supply and the power supply electrode, and an insulating material (power supply side insulating material, ground side insulating material) covering a side of one of the power supply electrode and the ground electrode, the side facing the other electrode.