公开(公告)号：US20220145023A1

公开(公告)日：2022-05-12

申请号：US17453102

申请日：2021-11-01

Applicant: East China University of Science and Technology

Inventor： Qixin ZHUANG ,  Zhe ZHANG ,  Xiaoyun LIU ,  Jian XU ,  Wentao WANG ,  Zeyang WU ,  Xiaohan WU ,  Lihui LI

IPC: C08J5/18 ,  C01B33/148

Abstract: The disclosure relates to the field of electronic materials, and in particular to a composite film of fluorinated polybenzoxazole (6FPBO) and triple-shelled mesoporous silica hollow spheres, and to its preparation and use. The composite film comprises fluorinated polybenzoxazole as a matrix and amino-functionalized triple-shelled mesoporous silica hollow spheres which are dispersed in the fluorinated polybenzoxazole matrix. A mass ratio of (amino-functionalized triple-shelled mesoporous silica hollow spheres)/(fluorinated polybenzoxazole) is 1/100 to 5/100. The composite film has excellent thermal stability and a lower dielectric constant.