公开(公告)号：US5436524A

公开(公告)日：1995-07-25

申请号：US141751

申请日：1993-10-27

申请人： Edward C. Hagen ,  Charles L. Hudson

发明人： Edward C. Hagen ,  Charles L. Hudson

IPC分类号： H01J23/24 ,  H01J23/10

CPC分类号： H01J23/24 ,  H01J2225/34

摘要： A new deflection structure (12) which deflects a beam of charged particles,uch as an electron beam (15), includes a serpentine set (20) for transmitting a deflection field, and a shielding frame (25) for housing the serpentine set (20). The serpentine set (20) includes a vertical serpentine deflection element (22) and a horizontal serpentine deflection element (24). These deflection elements (22, 24) are identical, and are interdigitatedly and orthogonally disposed relative to each other, for forming a central transmission passage (75), through which the electron beam (15) passes, and is deflected by the deflection field, so as to minimize drift space signal distortion. The shielding frame (25) includes a plurality of ground blocks (26, 28, 30, 32), and forms an internal serpentine trough (77) within these ground blocks, for housing the serpentine set (20). The deflection structure (12) further includes a plurality of feedthrough connectors (35, 37, 35I, 37I), which are inserted through the shielding frame (25), and which are electrically connected to the serpentine set (20).

摘要翻译： 使诸如电子束（15）的带电粒子束偏转的新的偏转结构（12）包括用于传输偏转场的蛇形组（20）和用于容纳蛇形组的屏蔽框架（25） 20）。 蛇形装置（20）包括垂直蛇形偏转元件（22）和水平蛇形偏转元件（24）。 这些偏转元件（22,24）是相同的并且相对于彼此交叉并正交地布置，用于形成电子束（15）通过的中心传输通道（75），并被偏转场偏转， 以最小化漂移空间信号失真。 屏蔽框架（25）包括多个接地块（26,28,30,32），并且在这些接地块内形成内部蛇形槽（77），用于容纳蛇形集合（20）。 偏转结构（12）还包括多个馈通连接器（35,37,351I，37I），它们穿过屏蔽框架（25）插入，并与蛇形组件（20）电连接。