公开(公告)号：US20140208838A1

公开(公告)日：2014-07-31

申请号：US13897293

申请日：2013-05-17

Applicant: Electronics and Telecommunications Research Institute

Inventor： Seung Eon MOON ,  Jae Woo LEE ,  Hyung-Kun LEE ,  Nak Jin CHOI ,  Woo Seok YANG ,  Jong Dae KIM

IPC: G01M15/10

CPC classification number: G01N27/16

Abstract: Provided is a catalytic combustible gas sensor using a porous membrane embedded micro-heater and a micro electro mechanical system (MEMS) technology. The present disclosure provides a gas sensor that is structurally, mechanically, and electrically stable, and has a simple device fabrication process in a MEMS catalytic combustible gas sensor that is miniaturized and also consumes a significantly small amount of power by puncturing a plurality of holes in membranes, a heating resistor, and a sensing electrode, by etching and thereby thermally isolating a substrate by a predetermined thickness through the plurality of holes, and by including a sensing structure formed using a sensing material and a compensation structure formed using a compensation material.

Abstract translation: 提供了一种使用多孔膜嵌入式微型加热器和微机电系统（MEMS）技术的催化可燃气体传感器。 本公开提供了一种在结构上，机械上和电气上稳定的气体传感器，并且在MEMS催化可燃气体传感器中具有简单的装置制造工艺，其小型化并且还通过在多孔中刺穿多个孔而消耗极少量的功率 膜，加热电阻器和感测电极，通过蚀刻，从而通过多个孔将基板热隔离预定厚度，并且包括使用感测材料形成的感测结构和使用补偿材料形成的补偿结构。

公开(公告)号：US20130244365A1

公开(公告)日：2013-09-19

申请号：US13791039

申请日：2013-03-08

Applicant: Electronics and Telecommunications Research Institute

Inventor： Hye Jin KIM ,  Sung Q LEE ,  Kang Ho PARK ,  Jong Dae KIM

IPC: H04R31/00

CPC classification number: H04R31/003 ,  H04R19/005 ,  H04R31/00 ,  H04R2499/11

Abstract: A condenser microphone having a flexure hinge diaphragm and a method of manufacturing the same are provided. The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer on the first insulating layer; forming sound holes by patterning the upper silicon layer; forming a second insulating layer and a conductive layer on the upper silicon layer; forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the layers to form an air gap between the diaphragm and the upper silicon layer. Consequently, a manufacturing process may improve the sensitivity and reduce the size of the condenser microphone.

Abstract translation: 提供一种具有挠性铰链膜片的电容麦克风及其制造方法。 该方法包括以下步骤：形成下硅层和第一绝缘层; 在所述第一绝缘层上形成上硅层; 通过图案化上硅层形成声孔; 在上硅层上形成第二绝缘层和导电层; 在导电层上形成钝化层; 在钝化层上形成牺牲层; 在牺牲层上沉积隔膜，并形成穿过隔膜的气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 并蚀刻各层以在隔膜和上硅层之间形成气隙。 因此，制造工艺可以提高电容传声器的灵敏度和减小尺寸。

公开(公告)号：US20140061825A1

公开(公告)日：2014-03-06

申请号：US13873195

申请日：2013-04-29

Applicant: Electronics and Telecommunications Research Institute

Inventor： Jae Woo LEE ,  Chang Han JE ,  Woo Seok YANG ,  Jong Dae KIM

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0018 ,  B81B3/0072 ,  B81B2201/0257 ,  B81C1/00158 ,  B81C1/00182 ,  H04R19/005 ,  H04R19/04 ,  H04R31/006

Abstract: Provided are a micro electro mechanical system (MEMS) acoustic sensor for removing a nonlinear component that occurs due to a vertical motion of a lower electrode when external sound pressure is received by fixing the lower electrode to a substrate using a fixing pin, and a fabrication method thereof. The MEMS acoustic sensor removes an undesired vertical motion of a fixed electrode when sound pressure is received by forming a fixing groove on a portion of the substrate and then forming a fixing pin on the fixing groove, and fixing the fixed electrode to the substrate using the fixing pin, and thereby improves a frequency response characteristic and also improves a yield of a process by inhibiting thermal deformation of the fixed electrode that may occur during the process.

Abstract translation: 提供了一种微机电系统（MEMS）声传感器，用于通过使用固定销将下电极固定到基板上来接收外部声压时，去除由于下电极的垂直运动而发生的非线性分量，以及制造 方法。 通过在基板的一部分上形成固定槽，然后在固定槽上形成固定销，并通过使用该固定电极将固定电极固定到基板上，MEMS声学传感器消除固定电极的不期望的垂直运动， 固定销，从而提高了频率响应特性，并且还通过抑制在该过程中可能发生的固定电极的热变形来提高工艺的产量。