公开(公告)号：US09117619B2

公开(公告)日：2015-08-25

申请号：US14534076

申请日：2014-11-05

Applicant: Electronics and Telecommunications Research Institute

Inventor： Dong-Ho Shin ,  Moon-Youn Jung

IPC: B05D3/06 ,  B05D3/04 ,  H01J27/02 ,  H01J27/00 ,  H01J27/24

CPC classification number: H01J27/24 ,  G21K1/003 ,  H05H6/00

Abstract: There is provided a device for generating a heavy-ion beam. The device includes a laser beam generating unit configured to generate a laser beam; a target configured to generate a heavy-ion beam by the laser beam; a laser optical system configured to focus the laser beam on the front of the target; and a plasma treating unit disposed at a rear surface of the target and configured to remove impurities within the target by plasma surface treatment that is performed by radiating cationic plasma onto the rear surface of the target.

Abstract translation: 提供了一种用于产生重离子束的装置。 该装置包括被配置为产生激光束的激光束产生单元; 被配置为通过所述激光束产生重离子束的目标; 激光光学系统，其被配置为将所述激光束聚焦在所述目标的前面; 以及等离子体处理单元，其设置在所述靶的后表面，并且被配置为通过等离子体表面处理来除去所述靶内的杂质，所述等离子体表面处理通