公开(公告)号：US4247781A

公开(公告)日：1981-01-27

申请号：US53443

申请日：1979-06-29

申请人： Erich H. Bayer ,  John R. Kranik ,  Wolfgang F. Mueller

发明人： Erich H. Bayer ,  John R. Kranik ,  Wolfgang F. Mueller

IPC分类号： C23C14/48 ,  C23C14/50 ,  C23C14/54 ,  H01J37/317 ,  H01L21/00 ,  H01L21/265 ,  H01L21/677 ,  H01J37/00

CPC分类号： H01L21/67748 ,  C23C14/48 ,  C23C14/505 ,  C23C14/541 ,  H01J37/3171 ,  H01L21/67069 ,  H01L21/67751

摘要： A rotating target ion bombard or implant apparatus with an arrangement for cooling the target. The cooling arrangement utilizes a pattern of air openings or passages and air fins. The pattern of air openings are positioned concentric to the disc hub and act to separate the hub region of the disc from the outer target or work region. The air openings function to both reduce the conductive cross-section between the hub region and outer work region of the disc and permit air to pass from the implant or bombard side to the back surface thereof. The air fins are provided on the back surface of the disc to draw air through the openings when rotating. Cooling is achieved by rotating in atmosphere during the load/unload cycle of operation. Reduction of the conductive cross-section between work region and hub region reduces heat transfer to the ferrofluidic feedthrough means coupled to the hub region thereby increasing the ferrofluidic feedthrough means lifetime.

摘要翻译： 具有用于冷却目标的装置的旋转目标离子轰击或植入装置。 冷却装置使用空气开口或通道和空气翅片的图案。 空气开口的图案与盘毂同心地定位，用于将盘的轮毂区域与外部目标或工作区域分开。 空气开口的作用是减小盘的轮毂区域和外部工作区域之间的导电横截面，并允许空气从植入物或轰击侧通过到其后表面。 空气翅片设置在盘的后表面上，以便在旋转时通过开口吸入空气。 在操作的装载/卸载循环期间通过在大气中旋转来实现冷却。 降低工作区域和轮毂区域之间的导电横截面减少了传递到耦合到轮毂区域的铁氟化物馈通装置的热传递，从而增加了铁磁流体通过装置寿命。