公开(公告)号：US11377728B2

公开(公告)日：2022-07-05

申请号：US16316680

申请日：2017-07-10

申请人： Evatec AG

发明人： Stephan Waldner

IPC分类号： C23C14/54 ,  C23C16/52 ,  G02B11/06 ,  G01B11/06

摘要： A method of in situ monitoring a thin film deposition process on a substrate, the method including a) defining a desired spectrum, the desired spectrum being a transmission or a reflection spectrum; b1) illuminating the substrate by means of a light source emitting light within the desired spectrum, b2) receiving light reflected from the substrate or transmitted through the substrate, b3) determining a transmission or a reflection spectrum out of the received light; c) defining a spectrum or a combination of spectra in dependency of the spectrum determined in step b3) to be a current spectrum; d) determining a weight spectrum as a function of the current spectrum; e) calculating a real number as a function of the current spectrum, of the desired spectrum and of the weight spectrum; f) exploiting the real number as indication for a deviation of the current spectrum from the desired spectrum.

公开(公告)号：US20200181763A1

公开(公告)日：2020-06-11

申请号：US16316680

申请日：2017-07-10

申请人： Evatec AG

发明人： Stephan Waldner

IPC分类号： C23C14/54 ,  C23C16/52 ,  G01B11/06

摘要： A method of in situ monitoring a thin film deposition process on a substrate, the method including a) defining a desired spectrum, the desired spectrum being a transmission or a reflection spectrum; b1) illuminating the substrate by means of a light source emitting light within the desired spectrum, b2) receiving light reflected from the substrate or transmitted through the substrate, b3) determining a transmission or a reflection spectrum out of the received light; c) defining a spectrum or a combination of spectra in dependency of the spectrum determined in step b3) to be a current spectrum; d) determining a weight spectrum as a function of the current spectrum; e) calculating a real number as a function of the current spectrum, of the desired spectrum and of the weight spectrum; f) exploiting the real number as indication for a deviation of the current spectrum from the desired spectrum.