公开(公告)号：US20190311874A1

公开(公告)日：2019-10-10

申请号：US16340449

申请日：2017-10-19

Applicant: Excillum AB

Inventor： Tomi TUOHIMAA ,  Per TAKMAN ,  Andrii SOFIIENKO

IPC: H01J35/30 ,  H01J35/08 ,  H01J35/14

Abstract: A system and method for generating X-ray radiation. The system includes an electron source operable to generate an electron beam and an X-ray target for generating X-ray radiation upon interaction with the electron beam. The method includes moving the electron beam over an edge separating a first region and a second region of the X-ray target, wherein the first region and the second region have different capability to generate X-ray radiation upon interaction with the electron beam. The system allows for a lateral extension of the electron beam to be determined based on a change in a quantity indicative of the interaction between the electron beam and the first region and between the electron beam and the second region, and the movement of the electron beam.