PIEZOELECTRIC ELEMENT AND ACTUATOR

    公开(公告)号:US20250107449A1

    公开(公告)日:2025-03-27

    申请号:US18889387

    申请日:2024-09-19

    Abstract: In a piezoelectric element and an actuator, the piezoelectric element includes a substrate; and a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode provided on the substrate in this order, in which the first piezoelectric film and the second piezoelectric film each have a perovskite-type oxide as a main component, and one of the first piezoelectric film and the second piezoelectric film is an epitaxial film and the other is a uniaxial alignment film.

Patent Agency Ranking