公开(公告)号：US20190033530A1

公开(公告)日：2019-01-31

申请号：US16145489

申请日：2018-09-28

Applicant: FURUKAWA ELECTRIC CO., LTD.

Inventor： Masanori TAKAHASHI ,  Yasuyoshi UCHIDA ,  Shintaro YAMASAKI ,  Junichi HASEGAWA

IPC: G02B6/35 ,  G02B6/293

Abstract: An optical waveguide circuit device includes: an optical waveguide circuit including a cladding layer formed on a substrate and made from silica-based glass, and an optical waveguide formed within the cladding layer and made from silica-based glass; heaters formed over the cladding layer and the optical waveguide and configured to heat the optical waveguide; wiring line electrode layers formed over the cladding layer, each of the wiring line electrode layers being coupled to a corresponding heater of the heaters and configured to allow electrical power to be supplied to the coupled heater; and an insulating layer covering the cladding layer, the heaters, and the wiring line electrode layers. The wiring line electrode layers adjacent to each other in a plan view are formed in different wiring layers. The wiring line electrode layers adjacent to each other in the same wiring layer are spaced by at least a predetermined distance.