GRATINGS WITH VARIABLE DEPTHS FOR WAVEGUIDE DISPLAYS

    公开(公告)号:US20210294006A1

    公开(公告)日:2021-09-23

    申请号:US17344016

    申请日:2021-06-10

    IPC分类号: G02B5/18 G02B27/01 G03F7/00

    摘要: A manufacturing system for fabricating self-aligned grating elements with a variable refractive index includes a patterning system, a deposition system, and an etching system. The manufacturing system performs a lithographic patterning of one or more photoresists to create a stack over a substrate. The manufacturing system performs a conformal deposition of a protective coating on the stack. The manufacturing system performs a deposition of a first photoresist of a first refractive index on the protective coating. The manufacturing system performs a removal of the first photoresist to achieve a threshold value of first thickness. The manufacturing system performs a deposition of a second photoresist of a second refractive index on the first photoresist. The second refractive index is greater than the first refractive index. The manufacturing system performs a removal of the second photoresist to achieve a threshold value of second thickness to form a portion of an optical grating.

    Variable neutral density filter for multi-beam interference lithography exposure

    公开(公告)号:US10712670B1

    公开(公告)日:2020-07-14

    申请号:US16686241

    申请日:2019-11-18

    IPC分类号: G03F7/20 G02B5/20 G02B5/18

    摘要: A method comprises disposing a photosensitive film layer on a surface of a substrate layer and placing a variable neutral density (ND) filter such that a surface of the variable ND filter faces an exposure region of the photosensitive film layer. The variable ND filter is a thin film that has an attenuation profile that modulates transmittance of light passing through the variable ND filter to the exposure region to cancel out an uneven power distribution in an intermediate interference exposure pattern at the exposure region of the photosensitive film layer. The method further comprises arranging one or more laser generators such that at least two generated beams of light from the one or more laser generators intersect with each other and form the intermediate interference exposure pattern that is modulated by the variable ND filter to form a target interference exposure pattern at the exposure region.

    GRATINGS WITH VARIABLE DEPTHS FOR WAVEGUIDE DISPLAYS

    公开(公告)号:US20190324176A1

    公开(公告)日:2019-10-24

    申请号:US15960308

    申请日:2018-04-23

    IPC分类号: G02B5/18 G02B27/01

    摘要: A manufacturing system for fabricating self-aligned grating elements with a variable refractive index includes a patterning system, a deposition system, and an etching system. The manufacturing system performs a lithographic patterning of one or more photoresists to create a stack over a substrate. The manufacturing system performs a conformal deposition of a protective coating on the stack. The manufacturing system performs a deposition of a first photoresist of a first refractive index on the protective coating. The manufacturing system performs a removal of the first photoresist to achieve a threshold value of first thickness. The manufacturing system performs a deposition of a second photoresist of a second refractive index on the first photoresist. The second refractive index is greater than the first refractive index. The manufacturing system performs a removal of the second photoresist to achieve a threshold value of second thickness to form a portion of an optical grating.

    Duty cycle range increase for waveguide combiners

    公开(公告)号:US11150394B2

    公开(公告)日:2021-10-19

    申请号:US16264245

    申请日:2019-01-31

    IPC分类号: G02B6/00 F21V8/00 G02B27/01

    摘要: Techniques for fabricating a slanted structure are disclosed. In one embodiment, a method of fabricating a slanted surface-relief structure in a material layer includes forming a thin hard mask on top of an intermediate mask layer, etching the intermediate mask layer at a slant angle using the thin hard mask to form a slanted intermediate mask, and etching the material layer at the slant angle using the slanted intermediate mask to form the slanted surface-relief structure in the material layer. The intermediate mask layer is characterized by an etch rate greater than an etch rate of the material layer.