公开(公告)号：US08743375B2

公开(公告)日：2014-06-03

申请号：US13582335

申请日：2012-08-07

Applicant: Fang-Fu Chen ,  Tao Ding

Inventor： Fang-Fu Chen ,  Tao Ding

IPC: G01B11/26 ,  G01B11/14

CPC classification number: G01B11/272

Abstract: Provided is a parallelism measuring system and a method thereof, wherein the system includes a measured module, which includes a measured unit; a reference unit; and an optical measuring unit including an optical measuring module and a shift module. A lower surface of the measured unit is a measured surface and an upper surface of the reference is a reference surface. The optical measuring module includes a light source unit, a reflecting unit, and a sensing unit. A collimated beam is emitted from the light source unit and sequentially reflected by the measured surface, the reflecting unit and the reference surface to the sensing unit. The sensing unit senses location of the collimated beam and thereby calculates interval distance between the measured surface and the reference surface. By using the shift module to move the optical measuring module, the interval distance between different points may be measured.

Abstract translation: 提供一种并行测量系统及其方法，其中系统包括测量模块，其包括测量单元; 参考单位 以及包括光学测量模块和移位模块的光学测量单元。 测量单元的下表面是测量表面，参考的上表面是参考表面。 光学测量模块包括光源单元，反射单元和感测单元。 准直光束从光源单元发射并被测量的表面，反射单元和参考表面依次反射到感测单元。 感测单元感测准直光束的位置，从而计算测量的表面和参考表面之间的间隔距离。 通过使用移位模块移动光学测量模块，可以测量不同点之间的间隔距离。

公开(公告)号：US20130342829A1

公开(公告)日：2013-12-26

申请号：US13582335

申请日：2012-08-07

Applicant: Fang-Fu Chen ,  Tao Ding

Inventor： Fang-Fu Chen ,  Tao Ding

IPC: G01B11/26

CPC classification number: G01B11/272

Abstract: Provided is a parallelism measuring system and a method thereof, wherein the system includes a measured module, which includes a measured unit; a reference unit; and an optical measuring unit including an optical measuring module and a shift module. A lower surface of the measured unit is a measured surface and an upper surface of the reference is a reference surface. The optical measuring module includes a light source unit, a reflecting unit, and a sensing unit. A collimated beam is emitted from the light source unit and sequentially reflected by the measured surface, the reflecting unit and the reference surface to the sensing unit. The sensing unit senses location of the collimated beam and thereby calculates interval distance between the measured surface and the reference surface. By using the shift module to move the optical measuring module, the interval distance between different points may be measured.

Abstract translation: 提供一种并行测量系统及其方法，其中系统包括测量模块，其包括测量单元; 参考单位 以及包括光学测量模块和移位模块的光学测量单元。 测量单元的下表面是测量表面，参考的上表面是参考表面。 光学测量模块包括光源单元，反射单元和感测单元。 准直光束从光源单元发射并被测量的表面，反射单元和参考表面依次反射到感测单元。 感测单元感测准直光束的位置，从而计算测量的表面和参考表面之间的间隔距离。 通过使用移位模块移动光学测量模块，可以测量不同点之间的间隔距离。