公开(公告)号：US12203959B2

公开(公告)日：2025-01-21

申请号：US18510290

申请日：2023-11-15

Applicant: FormFactor, Inc.

Inventor： Martin Schindler ,  Felix Krug

IPC: G01R1/067

Abstract: Methods of establishing contact between a probe tip of a probe system and a device under test, probe systems that perform the methods, and storage media that directs probe systems to perform the methods. The methods include measuring a height differential between a DUT surface of the DUT and an auxiliary surface of an auxiliary chuck and aligning the probe tip and the auxiliary chuck for contact with one another. The methods also include physically contacting the probe tip with the auxiliary surface to determine an auxiliary contact height between the probe tip and the auxiliary surface and determining a DUT contact height between the probe tip and the DUT surface. The methods further include aligning the probe tip and the DUT for contact with one another and moving the probe tip to the DUT contact height to physically contact the probe tip with the DUT surface.

公开(公告)号：US20240168058A1

公开(公告)日：2024-05-23

申请号：US18510290

申请日：2023-11-15

Applicant: FormFactor, Inc.

Inventor： Martin Schindler ,  Felix Krug

IPC: G01R1/067

CPC classification number: G01R1/06794

Abstract: Methods of establishing contact between a probe tip of a probe system and a device under test, probe systems that perform the methods, and storage media that directs probe systems to perform the methods. The methods include measuring a height differential between a DUT surface of the DUT and an auxiliary surface of an auxiliary chuck and aligning the probe tip and the auxiliary chuck for contact with one another. The methods also include physically contacting the probe tip with the auxiliary surface to determine an auxiliary contact height between the probe tip and the auxiliary surface and determining a DUT contact height between the probe tip and the DUT surface. The methods further include aligning the probe tip and the DUT for contact with one another and moving the probe tip to the DUT contact height to physically contact the probe tip with the DUT surface.