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公开(公告)号：US20150022893A1
公开(公告)日：2015-01-22
申请号：US14381535
申请日：2013-02-25
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. , Friedrich-Schiller-Universität Jena
发明人： Frank Fuchs , Uwe D. Zeitner , Ernst-Bernhard Kley
CPC分类号： G02B5/1861 , B05D5/061 , B05D2350/30 , G02B1/115 , G02B5/0833 , G02B5/18 , G02B5/1847 , G02B5/1866 , G02B2005/1804
摘要： A diffraction grating includes a grating area having, in a direction running parallel to a substrate, a periodic arrangement of first areas with a first grating material and second areas with a second grating material. The first grating material and the second grating material are solid materials with different indices of refraction. A reflection-reducing or reflection-increasing layer system having at least two layers with different indices refraction. The reflection-reducing or reflection-increasing layer system is arranged on one side of the grating area facing away from the substrate, and an additional layer system having at least two layers with different indices of refraction is arranged between the substrate and the grating area. A method for producing the diffraction grating is also specified.
摘要翻译： 衍射光栅包括光栅区域，其在平行于衬底的方向上具有第一区域与第一光栅材料的周期性布置，第二区域具有第二光栅材料。 第一光栅材料和第二光栅材料是具有不同折射率的固体材料。 具有至少两层具有不同折射率折射的反射减少或反射增加层系统。 反射减少或反射增加层系统布置在背离衬底的光栅区域的一侧上，并且在衬底和光栅区域之间布置具有不同折射率的至少两层的附加层系统。 还规定了衍射光栅的制造方法。
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公开(公告)号：US20220397707A1
公开(公告)日：2022-12-15
申请号：US17773669
申请日：2020-12-07
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. , Friedrich-Schiller-Universität Jena
摘要： A method for producing a diffractive optical element and a diffractive optical element are disclosed. In an embodiment a method for producing a diffractive optical element includes generating a surface structure by implanting ions into a material of a substrate, a layer or a layer system, wherein the surface structure includes a structure height of less than 10 nm.
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