公开(公告)号：US4886592A

公开(公告)日：1989-12-12

申请号：US196724

申请日：1988-05-20

申请人： Friedrich Anderle ,  Dan L. Costescu ,  Stefan Kempf ,  Emmerich Novak ,  Jaroslav Zejda

发明人： Friedrich Anderle ,  Dan L. Costescu ,  Stefan Kempf ,  Emmerich Novak ,  Jaroslav Zejda

IPC分类号： C23C14/50 ,  C23C14/56 ,  H01L21/00 ,  H01L21/687

CPC分类号： H01L21/6719 ,  C23C14/505 ,  C23C14/566 ,  C23C14/568 ,  H01L21/67126 ,  H01L21/6715 ,  H01L21/68764 ,  H01L21/68771 ,  Y10S414/139

摘要： A rotatable substrate holder (6) which has a plurality of substrate pickups in a circular arrangement at equal distances apart is disposed in a vacuum chamber (1). A corresponding number of substrates are driven stepwise on a circular path from an air lock station (8, 9) through at least one coating station (10, 11) to the air lock station. To increase the throughput of substrates, the vacuum chamber (1) has two air lock stations (8, 9) and two coating stations (10, 11) one following the other. The step size of the drive (36) on the one hand, and the angular position of each coating station (10 and 11, respectively) with respect to the air lock station associated with it (8 and 9, respectively) with reference to the axis of rotation of the substrate holder (6) on the other hand, are selected such that one and the same coating station (10 and 11, respectively), through the step-wise movement of a particular substrate pickup (63), is associated in each case with one and the same air lock station (8 and 9, respectively).

摘要翻译： 在真空室（1）中设置有可旋转的基板保持器（6），该基板保持器（6）具有多个间隔开的圆形布置的基板拾取器。 相应数量的基板在从空气锁定站（8,9）通过至少一个涂布站（10,11）到空气锁定站的圆形路径上逐步驱动。 为了增加基板的生产量，真空室（1）具有两个紧邻的空气锁定站（8,9）和两个涂覆站（10,11）。 一方面驱动器（36）的台阶大小以及相对于与其相关联的空气锁定站（分别为8和9）的每个涂覆站（分别为10和11）的角位置参考 另一方面，衬底保持器（6）的旋转轴线被选择成使得通过特定衬底拾取器（63）的逐步移动的相同的涂覆站（10和11）分别相关联 在每种情况下都有同一个空气锁定站（分别为8和9）。